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    ¾ÅÓλáJ9 ä¯ÀÀ´ÎÊý:2081 ·ÖÀà:ÐÐÒµ×ÊѶ

    Research Advances in UV Aging of Parylene Film

    Õª¡¡Òª :

    ¼òÂÔ½é½BÁËParyleneËÜÁϱ¡Ä¤µÄÓÅÁ¼ÌØÐÔ¼°Æä¹Ø¼üÔËÓ÷¶³ë¡£¾ßÌåÃèÊöÁ˹úÄÚ¶ÔParyleneËÜÁϱ¡Ä¤ÔÚ×ÏÍâÏßÖ±Éä±ê×¼ÏÂË¥ÀϸöÈËÐÐΪµÄÈ«ÐÂÑо¿³É¹û¡£Ì½ÌÖÁË×ÏÍâÏßË¥ÀϵÄÔ­Àí¡¢¹Ø¼ü×´¿ö¡¢ÎïÖÊ£¬¼°ÆäË¥À϶ÔParylene±¡Ä¤¹âÑ§ÌØÐÔ¡¢Í¸ÆøÐÔÍ¸ÆøÐÔÄÜÄÜ¡¢ÎïÀíÐÔÄÜ¡¢µç´Å³¡ÀíÂÛÌØÐÔµÄΣº¦¡£

    Abstract :

    The excellent properties and main applications of Parylene film were introduced. The latestresearch advances in UV aging of Parylene film were summarized. The mechanism, main

    phenomenon and products of UV aging, and the effects of UV aging on the optical properties,water permeability and air permeability, mechanical properties and electromagnetic properties of Parylene film were discussed.

    ¹Ø¼ü×Ö :

    ¾Û¶Ô±½³Å¶þ¼×»ù£»×ÏÍâÏßË¥ÀÏ£»ÎïÖÊ£»ÌØÐÔ

    Key words :

    Parylene; UV aging; Products; Properties

     

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    ͼ1 ¼¸Àà³£¼ûParyleneµÄ»¯Ñ§½á¹¹

    Fig.1 Chemical structure of commercial Parylenes

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    1 ParyleneËÜÁϱ¡Ä¤ÀÏ»¯¸öÈËÐÐΪ

    SantuciµÈ¶ÔParyleneËÜÁϱ¡Ä¤ÔÚ×ÏÍâ¹â-Äܼû¹âÇø¶Ô¹âÏßµÄÏû»¯ÎüÊÕ×´¿ö¿ªÕ¹ÁËÏ꾡µÄ¿ÆÑ§Ñо¿£¬½á¹ûÏÔʾ£¬ParyleneËÜÁϱ¡Ä¤¶Ô340 nm֮ϵÄ×ÏÍâÏßÏû»¯ÎüÊÕÃ÷ÏÔ£¬¶øÕë¶Ô340nmÒÔÉϵĹâ»ù±¾Éϲ»Ïû»¯ÎüÊÕ[29,36-37]¡£Òò¶øParyleneËÜÁϱ¡Ä¤ÀÏ»¯¸öÈËÐÐΪ¹Ø¼ü¿ÆÑ§Ñо¿µÄÊÇ×ÏÍâÏß¹¦Ð§ÏµÄË¥ÀÏ¡£Ñ§Õß¶ÔParylene CËÜÁϱ¡Ä¤ÔÚ×ÏÍâ¹â-¿É¼û¹â·¶Î§ÄÚµÄÏû»¯ÎüÊÕ×´¿ö¿ªÕ¹Á˼ì²âÆÊÎö(ͼ2)£¬²¢¹Û²éµ½ÔÚ×ÏÍâÏßÖ±ÉäÏÂËÜÁϱ¡Ä¤»áÔì³É¡°Ê§ÂÌ¡±×´¿ö£»´ËÍâÔÚÓÐÑõÔ˶¯±ê׼ϣ¬ÆäÀÏ»¯¸öÈËÐÐΪ»á¼Ó¿ì£¬¡°Ê§ÂÌ¡±×´¿ö¸üΪÏÔÖø¡£

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    ͼ2 Parylene CËÜÁϱ¡Ä¤µÄ×ÏÍâ¹â-Äܼû¹âµÄͨ¹ý×´¿ö

    Fig.2 UV-visible light transmittance of Parylene C film

    1.1 ParyleneËÜÁϱ¡Ä¤ÀÏ»¯Ô­Àí

    ParyleneËÜÁϱ¡Ä¤ÔÚ»§Íâ¾­³¤Ê±¼äÈÕ¹âÖ±Éäºó£¬¿É¿¿ÐÔ¼±¾çϽµ[38-39]£¬ÑÓÐÔÌáÉýÇÒ¿¹À­Ç¿¶È¼õÉÙ¡£BeraµÈ¾ÍParylene CËÜÁϱ¡Ä¤µÄÀÏ»¯¿ªÕ¹ÁËÐí¶à¿ÆÑ§Ñо¿£¬ÌرðÊdz¬¹ý300 nm×ÏÍâÏßϵĴ໯¸öÈËÐÐΪ[40-41]£¬²¢Ñ¡ÓöàÖÖÐÎʽÆÊÎöÁËÆäÀÏ»¯ÎïÖÊ£¬×îºóÇ¿µ÷Parylene CËÜÁϱ¡Ä¤»á±»¹â¼¤Æð¶ø¶Ï¼ü£¬Ôì³ÉÑõ×ÔÓÉ»ù½ø¶øÔì³É»¯Ñ§½µ½â£¬×ª»¯³ÉһЩµÍÏà¶Ô·Ö×ÓÖÊÁ¿µÄË¥ÀÏÎïÖÊ£¬Æä¹Ø¼üÈܽâÈ«¹ý³ÌÈçÏÂͼ3ËùÏÔʾ¡£ËýÃÇÁ˽âÁËParylene NµÄË¥ÀÏÔ­Àí£¬¾õµÃËüµÄË¥ÀÏ×îÏÈÊÇÒÔ¡ªCH2¡ªµÄ¿ÕÆøÑõ»¯Öð½¥£¬½ø¶øÔÚÑô¹âÕÕÉä×´¿öÏÂת»¯³ÉÈ©¡¢·Ò·¼Ëá¡¢õ¥µÈÑõ»¯²úÎ´ËÍ⣬¸ù¾ÝÀÏ»¯ÎïÖʵĴ߻¯ÁѽâʵÑé·¢¾õÁËСÁ¿Âȶ¡¶þÏ©µÄÔì³É£¬Õâ½øÒ»²½±íÃ÷¹âÑõË¥ÀÏÊǸù¾Ý×ÔÓÉ»ù·´Ó¦Ô­Àí¿ªÕ¹µÄ¡£³ý´ËÖ®Í⣬Õë¶ÔParylene¸ß¾ÛÎ¹ÙÄÜÍÅ¶ÔÆäÌØÐÔΣº¦·Ç³£´ó£¬Òò¶øÏà¹ØParylene CËÜÁϱ¡Ä¤Ë¥ÀÏÔ­ÀíºÍÌØÐÔת±äµÄ¿ÆÑ§Ñо¿Ò²Óкܶ๤×÷ÖбØÐë½øÐС£

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    ͼ3 Parylene CÏû»¯ÎüÊÕ¹âÆÆÁѲúÉúµÄС·Ö×ÓË®

    Fig.3 Formation of low molecular due to \’light absorbing\’ of Parylene C

    1.2 ParyleneËÜÁϱ¡Ä¤ÀÏ»¯×´¿ö

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    ͼ4 Parylene CµÄÜÌÀàºÍÁùÔª»·¡°Ê§ÂÌ¡±ÎïÖÊ

    Fig.4 Etiolated production of fluorenes and hexatomic ring of Parylene C

    ÀÏ»¯Ôì³ÉParylene CËÜÁϱ¡Ä¤±ä´à£¬Ç¿¶ÈÌáÉýÇÒ¿¹À­Ç¿¶È½µµÍ¡£Nowlin[32]µÄÑо¿½á¹ûÏÔʾ£¬ËÜÁϱ¡Ä¤µÄ¿¹À­Ç¿¶ÈÓë±»Ñõ»¯Ë®Æ½Ïà¹Ø£¬¿ÕÆøÑõ»¯Ë®Æ½Ô½¸ß£¬¿¹À­Ç¿¶ÈÔ½µÍ£»´ËÍ⣬ͨ¹ý×ÏÍâÏßÖ±Éäºó£¬ËÜÁϱ¡Ä¤µÄÏà¶ÔÐÔ²£Á§»¯Î¶ÈÏÈÌáÉýºó¼õÉÙ¡£

    1.3 ParyleneËÜÁϱ¡Ä¤ÀÏ»¯ÎïÖÊ

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    ±í1 ×ÏÍâÏßË¥ÀÏÎïÖÊ

    Tab.1 UV aging products of Parylene C

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    2 ÀÏ»¯¶ÔParyleneËÜÁϱ¡Ä¤ÌØÐÔµÄΣº¦

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    2.1 µç×Ó¹âÑ§ÌØÐÔ

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    ͼ5 ÔÚ²»Ò»ÑùÆûÌåÖÐ͸¹â¶ÈËæÖ±Éä•r¼äµÄת±ä

    Fig.5 Transmittance changes with irradiation time in different gases

    2.2 Í¸ÆøÐÔÍ¸ÆøÐÔÄÜÄÜ

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    ͼ6 Ë®ÕôÆûͨ¹ýÐÔËæÖ±Éä•r¼äµÄת±äÇúÏßͼ

    Fig.6 Variation curve between vapor permeability and irradiation time

     

    2.3 ÎïÀíÐÔÄÜ

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    ÂÛÎIJο¼ÎÄÏ×£º

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